| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique advantageous for efficient utilization of a processing unit.SOLUTION: The drawing device having a plurality of drawing units for drawing on a substrate with a charged particle beam includes a plurality of first processing units which can be connected selectively with the plurality of drawing units, a determination unit which determines a first processing unit, out of the plurality of first processing units, to be connected with a first drawing unit among the plurality of drawing units on the basis of drawing data, and a connection unit which connects the first processing unit determined in the determination unit with the first drawing unit. |
