Dimensional interferometric optical measurement probe for dimensional measurements of e.g. defects of circularity, of cylindrical hole of fuel injector, has longitudinal grooves, partition wall and reflectors formed on body

摘要

The probe (10) has a body (14) including longitudinal grooves (18, 20) to receive optical fiber. A partition wall (28) is placed to divide a light beam from the fiber into secondary beams (F-S1, F-S2). A reflector (30) placed relative to the groove and the wall reflects one of the secondary beams to form a reflected secondary beam (F-SR1). Another reflector (32), directed parallel to the wall and placed relative to one of the grooves, reflects a recombined beam (F-REC) from the wall to the fiber and combines the secondary beams. The grooves, the wall and the reflectors are formed on the body. The body is made of mono-crystalline silicon.