| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a magnetic disk substrate which can reduce alumina particles sticking into the substrate.SOLUTION: A method of manufacturing a magnetic disk substrate includes the steps of: (1) using a polishing liquid composition A containing alumina particles and water to polish a surface to be polished of a substrate to be polished; (2) rinsing the substrate obtained in the step 1; (3) using a polishing liquid composition B containing silica particles, a nitrogen-containing compound, and water to polish the surface to be polished of the substrate obtained in the step 2; (4) washing the substrate obtained in the step 3; and (5) using a polishing liquid composition C containing silica particles and water to polish the surface to be polished of the substrate obtained in the step 4. The steps 1-3 are performed in the same polishing machine, and the step 5 is performed in another polishing machine different from the polishing machine. |
