| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect correction device and a defect correction method by which, when removing a foreign substance mixed in a substrate used for a flat panel display with a working needle, damage to a substrate correction surface due to contact of the working needle can be prevented to enable high quality correction.SOLUTION: A defect correction device includes a foreign substance removal device 1, and removes a foreign substance 15 on a substrate 12 with a working needle 2 provided in the foreign substance removal device 1, to correct a defect in fine patterns of the substrate 12. The foreign substance removal device 1 includes a contact detector 3 for detecting contact of the working needle 2 and the substrate 12. |
