发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 According to one embodiment, a method for manufacturing a semiconductor device includes implanting impurity ions to a semiconductor layer in which an electrode is embedded; forming a light absorption film which absorbs laser light at a side of the electrode to which the laser light is irradiated; and activating the impurity ions by irradiating laser light to the semiconductor layer at which the light absorption film is formed in the forming.
申请公布号 US2013183792(A1) 申请公布日期 2013.07.18
申请号 US201213525616 申请日期 2012.06.18
申请人 KUDO TOMOYASU;YOSHINO KENICHI;KAMIMURA MASAKI;KABUSHIKI KAISHA TOSHIBA 发明人 KUDO TOMOYASU;YOSHINO KENICHI;KAMIMURA MASAKI
分类号 H01L31/0232;H01L31/02 主分类号 H01L31/0232
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