| 摘要 |
PROBLEM TO BE SOLVED: To provide a III-N substrate and a III-N template, having an improved surface structure.SOLUTION: A self-standing type III-N substrate, in which the III represents at least one group III element of the periodic table selected from among Al, Ga and In, has a diameter of more than 40 mm and a standard deviation of an rms value of 5% or less, the rms value being obtained in mapping on the surface of the III-N substrate using white light interferometry. A III-N template, in which the III represents at least one group III element of the periodic table selected from among Al, Ga and In, includes a heterogeneous substrate, a III-N upper layer, and one or a plurality of intermediate layers optionally formed of III-N or other materials, and has a diameter of more than 40 mm and a standard deviation of an rms value of 5% or less, the rms value being obtained in mapping on the surface of the III-N substrate using white light interferometry. |
