发明名称 MANUFACTURING METHOD FOR ULTRASONIC THICKNESS SENSOR
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method for an ultrasonic thickness measurement sensor which can follow up even a curved surface to be measured of a thin and flexible ultrasonic thickness measurement sensor, can eliminate various works before and after thickness measurement, while reducing the effort and time required for the thickness measurement, by always pasting a sheet to a part being measured, and can measure the thickness of a large number of parts simultaneously or can measure the thickness continuously.SOLUTION: A thin sheet is made of a slurry principally composed of powder of an oxide-based piezoelectric material which is a raw material of the ceramic piezoelectric. The sheet is pasted to the surface of a thin metal plate to be the one electrode. Subsequently, the slurry is heated and calcined to form on the surface of the metal plate, a relatively porous thin sintered compact layer capable of exhibiting flexibility. Thereafter, the other electrode is attached and polarization is performed so that flexibility may be exhibited as a whole censor.
申请公布号 JP2013140887(A) 申请公布日期 2013.07.18
申请号 JP20120000606 申请日期 2012.01.05
申请人 MITSUBISHI HEAVY IND LTD 发明人 MORI KAZUTAKA;NANBA KATSUMI;TORIGOE TAIJI;YAMAMOTO YUKO;UEMOTO AKIHIRO;KAWANAMI SEIICHI
分类号 H01L41/22;C04B35/491;G01B17/02;H01L41/08;H01L41/187;H01L41/257;H01L41/39 主分类号 H01L41/22
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