发明名称 |
OPTICAL COMPONENT FOR EUVL AND SMOOTHING METHOD THEREOF |
摘要 |
The present invention is to provide a method for smoothing the optical surface having a concave defect of an optical component for EUVL. The present invention relates to a method for smoothing the optical surface of an optical component for EUVL, comprising irradiating, with an excimer laser having a wavelength of 250 nm or less with a fluence of 0.5 to 2.0 J/cm2, the optical surface having a concave defect of an optical component for EUV lithography (EUVL), the optical component being made of a TiO2-containing silica glass material comprising SiO2 as a main component. |
申请公布号 |
EP2245510(B1) |
申请公布日期 |
2013.07.17 |
申请号 |
EP20090712929 |
申请日期 |
2009.02.19 |
申请人 |
ASAHI GLASS COMPANY, LIMITED |
发明人 |
ONO, MOTOSHI;WATANABE, MITSURU;ITO, MASABUMI |
分类号 |
B23K26/02;C03C3/06;C03C23/00;G02B3/00;G03F1/00;G03F1/24;G03F1/60;G03F1/72;G21K1/06;H01L21/027 |
主分类号 |
B23K26/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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