| 摘要 |
PURPOSE: An atmospheric plasma generating apparatus is provided to separate a plasma generating unit and a circuit unit using a switching element to discharge and steadily maintain plasma even in a bare electrode structure. CONSTITUTION: First and second switching elements(11,12) serially connected between a plasma generating unit and a power supply unit controls the power supply at the operation of plasma generation. A variable capacitor(13) is connected in parallel to a contact point between the first and second switching elements. The variable capacitor connects one side electrode at the contract point, connects a different side electrode to a ground terminal and charges before starting the plasma operation. The variable capacitor supplies discharge energy to the plasma generating unit at the operation of plasma generation by the control of the first and second switching elements. The plasma generation unit having a cylindrical shape has a first electrode(14) supplying a DC pulse by being connected to the second switching element and a second electrode(15) facing the first electrode. |
