发明名称 Method of dispensing imprintable medium
摘要 An imprintable medium dispenser includes a chamber, a nozzle, and an actuator connected to the chamber and configured to be actuated and thereby generate a pressure wave within the chamber such that imprintable medium is dispensed from the nozzle. The imprintable medium dispenser is provided with a control circuit which includes a monitoring apparatus configured to receive a transient oscillation signal generated when the actuator is actuated, and to monitor the operation of the imprintable medium dispenser by monitoring the transient oscillation signal.
申请公布号 US8486485(B2) 申请公布日期 2013.07.16
申请号 US201113194630 申请日期 2011.07.29
申请人 DIJKSMAN JOHAN FREDERIK;PIERIK ANKE;VERNHOUT MARTIN MAURICE;WUISTER SANDER FREDERIK;KRUIJT-STEGEMAN YVONNE WENDELA;SCHRAM IVAR;ASML NETHERLANDS B.V. 发明人 DIJKSMAN JOHAN FREDERIK;PIERIK ANKE;VERNHOUT MARTIN MAURICE;WUISTER SANDER FREDERIK;KRUIJT-STEGEMAN YVONNE WENDELA;SCHRAM IVAR
分类号 B05D5/12;C23C16/52 主分类号 B05D5/12
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