发明名称 |
Method of dispensing imprintable medium |
摘要 |
An imprintable medium dispenser includes a chamber, a nozzle, and an actuator connected to the chamber and configured to be actuated and thereby generate a pressure wave within the chamber such that imprintable medium is dispensed from the nozzle. The imprintable medium dispenser is provided with a control circuit which includes a monitoring apparatus configured to receive a transient oscillation signal generated when the actuator is actuated, and to monitor the operation of the imprintable medium dispenser by monitoring the transient oscillation signal.
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申请公布号 |
US8486485(B2) |
申请公布日期 |
2013.07.16 |
申请号 |
US201113194630 |
申请日期 |
2011.07.29 |
申请人 |
DIJKSMAN JOHAN FREDERIK;PIERIK ANKE;VERNHOUT MARTIN MAURICE;WUISTER SANDER FREDERIK;KRUIJT-STEGEMAN YVONNE WENDELA;SCHRAM IVAR;ASML NETHERLANDS B.V. |
发明人 |
DIJKSMAN JOHAN FREDERIK;PIERIK ANKE;VERNHOUT MARTIN MAURICE;WUISTER SANDER FREDERIK;KRUIJT-STEGEMAN YVONNE WENDELA;SCHRAM IVAR |
分类号 |
B05D5/12;C23C16/52 |
主分类号 |
B05D5/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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