发明名称 Interconnects with improved electromigration reliability
摘要 An interconnect structure in a semiconductor device may be formed to include a number of segments. Each segment may include a first metal. A barrier structure may be located between the plurality of segments to enable the interconnect structure to avoid electromigration problems.
申请公布号 US8486767(B2) 申请公布日期 2013.07.16
申请号 US201113166988 申请日期 2011.06.23
申请人 ZHAI JUN;WANG FEI;ADVANCED MICRO DEVICES, INC. 发明人 ZHAI JUN;WANG FEI
分类号 H01L21/82 主分类号 H01L21/82
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