| 摘要 |
An apparatus and a method for manufacturing a flat panel display are provided to measure the thickness of a thin film deposited on a substrate in real time using an ellipsometer located in a deposition chamber and correct the thickness in real time. An apparatus for manufacturing a flat panel display includes a deposition chamber in which a thin film is deposited on a substrate(41) at a predetermined deposition rate, a thickness measurement unit(43), a deposition rate measurement sensor(47), and a controller(49). The thickness measurement unit is set in the deposition chamber and measures the thickness of the thin film in real time. The deposition rate measurement sensor measures the deposition rate of the thin film deposited on the substrate. The controller corrects a difference between the deposition rate measured by the deposition rate measurement sensor and the predetermined deposition rate using the thickness measured by the thickness measurement unit. |
