| 摘要 |
PURPOSE: A fine application apparatus for a high aspect ratio shape using an ultra-short pulse laser is provided to precisely process a fine shape with a high aspect ratio by using plasma created by ultra-short pulse laser. CONSTITUTION: A fine application apparatus for a high aspect ratio shape comprises a laser source(1) which generates ultra-short pulse laser beams and a condensing lens(2) which condenses the laser beams generated by the laser source so that the laser beams passing through the condensing lens generate plasma channeling. A work piece(50) is arranged in the area of plasma channeling, thereby implementing shape processing. |
