| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying device that can appropriately carry a plate-like member on which a fluidized lamination material is deposited while supporting the member from the lamination material deposited face side.SOLUTION: A carrying device 1 includes: a holding body 2 having a holding surface 21 opposing a wafer WF; a gas supplying means 3 that forms a negative pressure area AV between the holding surface 21 and the wafer WF by controlling a flowing direction of cold air CW jetted from the holding surface 21 and holds the wafer WF in a non-contact state; a cold air blowing means 31 for solidifying a fluidized re-adhesive layer AD1; and a carrying means 4 for carrying the holding body 2. The gas supplying means controls the cold air CW so that the cold air flows toward the outside after contacting with only a fringe area WF1 in the wafer WF. |
