发明名称 DISPLACEMENT DETECTION DEVICE AND METHOD
摘要 According to one embodiment, a displacement detection device includes a light source, objective lens, beam splitter, aperture limiting element, and detection device. The beam splitter may separate reflected light into portions. The reflected light may be reflected by the medium and then transmitted through the objective lens. The aperture limiting element may include an aperture limited so as to block a portion of the reflected light. The detection device may detect displacement of the medium in a direction of the optical axis based on the reflected light having passed through the aperture limiting element.
申请公布号 US2013176576(A1) 申请公布日期 2013.07.11
申请号 US201313781029 申请日期 2013.02.28
申请人 KABUSHIKI KAISHA TOSHIBA;KABUSHIKI KAISHA TOSHIBA 发明人 WATABE KAZUO;USUI TAKASHI;OKANO HIDEAKI;OGAWA AKIHITO;UEDA YASUHITO;TATSUTA SHINICHI;KUBOTA YUJI
分类号 G01B11/14 主分类号 G01B11/14
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