| 摘要 |
A storage Pod for semiconductor substrates includes a top cover formed from a non-air permeable (NAP) material having faces including a top and a plurality of sides. A bottom base plate has a locking structure configured for providing a locking position for locking the sides, and for providing an unlocked position where the sides are detached from the bottom base plate. The top cover includes at least one aperture in the NAP material for allowing surrounding gases in an environment around the storage Pod to flow into the storage Pod to permit a gas sensor within the storage Pod to sense the target gas.
|
