发明名称 INDIUM SPUTTERING TARGET, AND METHOD FOR PRODUCING SAME
摘要 Provided is an indium sputtering target with which a short period of time is required for the stabilization of the film formation rate after initiating sputtering. The indium sputtering target has an arithmetic mean roughness (Ra) of 5mum-70mum on the surface thereof that is to be sputtered.
申请公布号 WO2013103029(A1) 申请公布日期 2013.07.11
申请号 WO2012JP70766 申请日期 2012.08.15
申请人 JX NIPPON MINING & METALS CORPORATION;ENDO,YOUSUKE;SAKAMOTO,MASARU 发明人 ENDO,YOUSUKE;SAKAMOTO,MASARU
分类号 C23C14/34 主分类号 C23C14/34
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