| 摘要 |
PROBLEM TO BE SOLVED: To provide an acoustic resonator structure, in a BAW resonator, by conquering an acoustic loss reducing a Q factor since the Q factor is reduced in the BAW resonator having an active domain because of the case where the loss may be enlarged by a connecting part to the active domain.SOLUTION: A solid-mount bulk acoustic resonator 100 comprises a first electrode 102, a second electrode 104, a piezoelectric layer 103 disposed between the first electrode and the second electrode, and an acoustic reflector 105 disposed below the first electrode, the second electrode and the piezoelectric layer and comprised of a plurality of layers. Portions of the first electrode, the second electrode and the piezoelectric layer overlapped with the acoustic reflector define an active domain 114 of the acoustic resonator, and the piezoelectric layer extends on an end (edge) of the first electrode. Furthermore, the acoustic resonator comprises a bridge 108 adjacent to a terminal of the active domain of the acoustic resonator. The bridge overlaps with a part of the first electrode. |
