SAMPLE LOADING DEVICE

摘要

PROBLEM TO BE SOLVED: To detect in real time a curvature amount of a wafer in high-speed rotation which is being inspected.SOLUTION: A sample loading device includes: a first light irradiation part which irradiates an analyte with light; a first detector which detects scattered light from the analyte; a second light irradiation part which irradiates the analyte with light; a second detector which detects the light emitted by the second light irradiation part and reflected by the analyte; an analyte moving stage which moves the analyte so that a position on the analyte irradiated with the light of the first light irradiation part and the light of the second light irradiation part changes; an inspection coordinate inspection part which outputs information on position coordinates of the position irradiated with the light; an elevation driving control circuit which outputs height information on the analyte based upon a detection signal from the second detector; and a data processing part which calculates the curvature amount of the analyte based upon the information on the position coordinates from the inspection coordinate inspection part and the height information from the elevation driving control circuit.