| 摘要 |
<p>The substrate plate (1) has a suction point (5) provided at a surface, such that it is provided at a distance (A) from surface of substrate plate. The suction points (5-8) are connected to a vacuum source via a channel (10-13) which is provided in substrate plate. The channel in surface of substrate plate is milled, and is closed by a closure piece.</p> |
