发明名称 |
MICROCRYSTALLINE SILICON ALLOYS FOR THIN FILM AND WAFER BASED SOLAR APPLICATIONS |
摘要 |
A method and apparatus for forming solar cells is provided. Doped crystalline semiconductor alloys including carbon, oxygen, and nitrogen are used as light-trapping enhancement layers and charge collection layers for thin-film solar cells. The semiconductor alloy layers are formed by providing semiconductor source compound and a co-component source compound to a processing chamber and ionizing the gases to deposit a layer on a substrate. The alloy layers provide improved control of refractive index, wide optical bandgap and high conductivity. |
申请公布号 |
EP2359411(A4) |
申请公布日期 |
2013.07.10 |
申请号 |
EP20090837898 |
申请日期 |
2009.12.16 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SHENG, SHURAN;CHAE, YONGKEE |
分类号 |
H01L31/0232;H01L31/0236;H01L31/076;H01L31/18;H01L31/20 |
主分类号 |
H01L31/0232 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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