发明名称 Micromechanical element mobile along at least one axis of rotation
摘要 The invention concerns a micromechanical element including a frame, a moving part rotating inside said frame, about an axis, two torsion beams connecting the moving part to said frame , aligned along the axis and provided with a portion of reinforced width, and stop members arranged on both sides of the reinforced portions, so as to limit the lateral movement of the moving part . According to the invention, the portions of reinforced width are integral with the frame , and the stop members are integral with the moving part.
申请公布号 US8482833(B2) 申请公布日期 2013.07.09
申请号 US201113311126 申请日期 2011.12.05
申请人 MARXER CORNEL;HERBST PETER;SERCALO MICROTECHNOLOGY LTD. 发明人 MARXER CORNEL;HERBST PETER
分类号 G02B26/08 主分类号 G02B26/08
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