发明名称 NONVOLATILE MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 <p>PURPOSE: A nonvolatile memory device and a method for fabricating the same are provided to reduce the channel resistance of a pass transistor by forming a metallic material layer which is in contact with the channel layer of the pass transistor. CONSTITUTION: A pass gate electrode is formed on the lower part of a gate structure. A sub channel hole (H2) is formed in the pass gate electrode. A pair of main channel holes (H1) is connected to the sub channel hole through the gate structure. A channel layer (170) is formed along the main channel holes and the inner wall of the sub channel hole. A metallic material layer is in contact with the channel layer.</p>
申请公布号 KR20130077450(A) 申请公布日期 2013.07.09
申请号 KR20110146168 申请日期 2011.12.29
申请人 SK HYNIX INC. 发明人 JOO, HAN SOO
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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