发明名称 |
APPARATUS FOR TRANSFERRING SUBSTRATE AND APPARATUS FOR PROCESSING SUBSTRATE USING THE SAME |
摘要 |
<p>PURPOSE: An apparatus for transferring a substrate and an apparatus for processing the substrate using the same are provided to maintain a production process in case of an emergency by selectively changing the transfer direction of a substrate. CONSTITUTION: A first roller (410) is arranged in a chamber. The first roller is rolled in a first direction. A second roller (420) is arranged in the lower part of the first roller. The second roller is rolled in a second direction. An elevating part (430) raises the second roller.</p> |
申请公布号 |
KR20130077582(A) |
申请公布日期 |
2013.07.09 |
申请号 |
KR20110146374 |
申请日期 |
2011.12.29 |
申请人 |
LIGADP CO., LTD. |
发明人 |
CHOI, EUN YOUL |
分类号 |
H01L21/677;B65G49/06;H01L21/205 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|