| 摘要 |
The invention relates to a microgyroscope for determining rotational movements about an x-axis and/or a y-axis and a z-axis. Oscillating masses are fastened to a substrate by springs. Drive elements vibrate individual masses in an oscillatory manner in the x-y plane in order to produce Coriolis forces when the substrate is rotated, and sensor elements detect deflections of the masses on account of the Coriolis forces produced. The Individual masses are arranged in two groups that are jointly induced by the drive elements to carry out an oscillating primary movement in the plane of the x-y axis. The masses of the first group allow movements starting from the x-y plane, and the masses of the second group allow movements perpendicular to the oscillating primary movement in the plane of the x-y axis.
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