发明名称 |
Automated materials handling system having multiple categories of overhead buffers |
摘要 |
An automated materials handling system comprises a plurality of overhead hoist buffers (OHBs) for receiving a plurality of semiconductor wafer carriers. Each OHB is assigned to a respective one of a plurality of categories. Each wafer carrier is associated with one or more of the plurality of categories. Each respective category is associated with at least one of a plurality of event trigger types. An overhead transport (OHT) if provided for transporting each of the plurality of wafer carriers to a respective one of the OHBs in response to a respective trigger event. Each trigger event has one of the plurality of event trigger types. Each wafer carrier is stored in a respective one of the plurality of OHBs assigned to a respective one of the categories associated with the respective event trigger type of the trigger event causing that wafer carrier to be transported and stored.
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申请公布号 |
US8483866(B2) |
申请公布日期 |
2013.07.09 |
申请号 |
US20090433581 |
申请日期 |
2009.04.30 |
申请人 |
HUANG CHIH-WEI;CHIEN WEN-CHI;SU CHI-CHAU;TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
HUANG CHIH-WEI;CHIEN WEN-CHI;SU CHI-CHAU |
分类号 |
H01L21/67 |
主分类号 |
H01L21/67 |
代理机构 |
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地址 |
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