| 摘要 |
PROBLEM TO BE SOLVED: To provide a terahertz camera suppressing heat dissipation from a pyroelectric element.SOLUTION: A pyroelectric detector comprises a pyroelectric detection element, a support member 210 and a support part. The pyroelectric detection element includes a first electrode, a second electrode 236 and a pyroelectric material 232. The first electrode includes a capacitor 230 having a first region 233A and a second region 233B. The pyroelectric detection element further includes a layer insulating film 260 covering the capacitor, a first contact hole 252 formed in the layer insulating film and communicated to the second region of the first electrode, a first plug 226 buried in the first contact hole, a second contact hole 254 formed in the layer insulating film 260 and communicated to the second electrode, a second plug 228 buried in the second contact hole, a first electrode wiring layer 222 connected to the first plug, and a second electrode wiring layer 224 connected to the second plug. Heat conductivity of the second electrode wiring layer is lower than that of a material of the second electrode in a portion connected with the second plug. |
