A DEVIDE FOR WIDELY AND CONTINUOUSLY MEASURING A SURFACE RESISTANCE

摘要

PURPOSE: A large area continuous sheet resistance measurement apparatus is provided to measure sheet resistance of a whole thin film continuously, and to reduce sheet resistance measurement time as enabling to perform accurate sheet resistance measurement. CONSTITUTION: A large area continuous sheet resistance measurement apparatus includes a rotation part (10), a contact part (20) and a sheet resistance measurement part (30). The rotation part includes more than one rotator (11). The contact part includes an electrode part (21). The electrode part is formed on the surface of the rotator and contacts with a thin film (40). The sheet resistance measurement part is electrically connected to the contact part, and receives sheet resistance of a part where the contact part contacts with the thin film. The rotator is a cylinder whose length is equal to or longer than the thin film. The electrode part includes more than a pair of electrodes, and the electrodes are formed in the circumference in a constant interval. The electrode part is electrically connected to the sheet resistance measurement part through a connection apparatus installed in the cylinder, and the connection apparatus is a slip ring.