| 摘要 |
PURPOSE: A reaction vessel is provided to prevent cracks and damage of the reaction vessel due to the difference of heat expansion of SiC and graphite by dipping a carbon source in the reaction vessel and reducing the generation of SiC from the reaction vessel. CONSTITUTION: A manufacturing method of a reaction vessel comprises the following steps: (a) a step of manufacturing a graphite molding produces by pressurizing graphite powder; and (b) a step of manufacturing a reaction vessel by processing the graphite molding product. A carbon source is dipped in the graphite molding product or the reaction vessel. The density of the reaction vessel is 1.8-2.1 g/cm^3. The porosity of the reaction vessel is 5-20%. The carbon source is selected from the group consisting of phenol resin, furan resin, xylene resin, polyimide, polyurethane, poly acrylonitrile, polyvinyl alcohol, polyvinylacetate, cellulose, or a mixture thereof. A vacuum heat treatment apparatus comprises a chamber, the reaction vessel, and a heating element. The reaction vessel comprises graphite and a dipped carbon source. [Reference numerals] (ST10) Step of manufacturing a molding product; (ST20) Step of manufacturing a reaction vessel by processing the molding product; (ST30) Step of dipping a carbon source into the reaction vessel |
