| 摘要 |
A seal hardening furnace is provided to contain a substrate into the seal hardening furnace vertically, thereby preventing the substrate from being curved by the influence of gravity and preventing a foreign substance floating into the seal hardening furnace from polluting the substrate. A seal hardening furnace(100) comprises upper and lower plates(114,116), both sides(118,120) and rears, and plural grips(130). The both sides and rears of the seal hardening furnace connect the upper and lower plates and define an entrance side(112). The plural grips are constituted on each of the upper and lower plates at regular intervals and fix both ends of a substrate(121) vertically contained. The grips are constituted to correspond to each other. The grip includes a rail(131), first and second compression units(133a,133b) in which an air inlet(135) is respectively constituted. A ring-shaped vacuum pad(137) is constituted around the air inlet. |
