| 摘要 |
A microelectromechanical system for detecting accelerations about or along an X-axis, Y-axis, and/or Z-axis, having a substrate and having a driving mass and a detection mass (1) disposed parallel to the substrate in an X-Y plane and mounted displaceably relative to the substrate. At least one slit (5) is disposed in the driving and/or detection mass (1) for compensating for distortions due to residual material stresses in the driving and/or detection mass (1).
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