| 发明名称 |
METHOD FOR DEPOSITING CHALCOGENIDES BY PHYSICAL CO-EVAPORATION |
| 摘要 |
<p>The invention relates to a method for depositing chalcogenides, controlling the gas pressure by means of pulsed, continuous activation of a valve on the source of chalcogen gas. Applying said pulses makes it possible to control the pressure in the chamber such that the stoichiometry can be easily controlled, while doing away with the need for complicated valves.</p> |
| 申请公布号 |
WO2013098450(A1) |
申请公布日期 |
2013.07.04 |
| 申请号 |
WO2012ES70898 |
申请日期 |
2012.12.21 |
| 申请人 |
CENTRO DE INVESTIGACIONES ENERGETICAS, MEDIOAMBIENTALES Y TECNOLOGICAS (CIEMAT) |
发明人 |
TRIGO ESCALERA, JUAN FRANCISCO;HERRERO RUEDA, JOSE;GUTIERREZ GARCIA, MA TERESA |
| 分类号 |
C23C14/26;H01L31/18 |
主分类号 |
C23C14/26 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
