SUBSTRATE PROCESS SYSTEM

摘要

PURPOSE: A substrate processing system is provided to perform a process on two substrates at the same time, and to improve process speed. CONSTITUTION: A transfer module (100) receives and transfers a pair of substrates from/to the outside. The substrate is vertical or inclined to the ground. Even-numbered process modules are combined with the transfer module. The process module receives the substrate from the transfer module and performs a process. The process module includes a process module group consisting of a first process module (210) and a second process module (220).