FILTER UNIT, MIST COLLECTING ARTICLE AND VACUUM PUMP UNIT

摘要

PROBLEM TO BE SOLVED: To provide a filter unit having high mist catching performance and excellent durability, a mist collecting article containing the filter unit, and a vacuum pump unit mounted with the filter unit or the mist collecting article.SOLUTION: The filter unit 1 for catching various types of mists includes a mist filter 2 and a base 3, and the mist filter 2 is arranged in a partitioned portion 5 formed in the base 3 and having a space 4. Pellet-like filter chips 10 composed of a nonwoven fabric 13 are contained in an air permeable bag 11.