发明名称 MANUFACTURING METHOD FOR ELECTROMECHANICAL CONVERSION FILM, MANUFACTURING METHOD FOR ELECTROMECHANICAL CONVERSION ELEMENT, ELECTROMECHANICAL CONVERSION ELEMENT, DROPLET DISCHARGE HEAD, DROPLET DISCHARGE DEVICE, AND IMAGE FORMING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method for an electromechanical conversion film capable of easily forming an electromechanical conversion film of a desired pattern and film thickness while reducing a manufacturing cost, a manufacturing method for an electromechanical conversion element, an electromechanical conversion element manufactured by the manufacturing method, a droplet discharge head, a droplet discharge device, and an image forming device.SOLUTION: A manufacturing method for an electromechanical conversion film comprises the steps of: partly modifying a surface of a first electrode; selectively applying a coating liquid including a material for forming an electromechanical conversion film to a prescribed portion on the first electrode; drying a film of the coating liquid applied onto the first electrode; and thermally decomposing and crystallizing the film of the dried coating liquid. At least the step of partly modifying the surface of the first electrode, the step of selectively applying the coating liquid to the prescribed portion, and the step of drying the film of the coating liquid are repeated several times in this order. The first step of modifying the surface of the first electrode is a step of partly removing the film of a silane coupling agent after forming the film of the silane coupling agent on the first electrode.
申请公布号 JP2013131722(A) 申请公布日期 2013.07.04
申请号 JP20110282120 申请日期 2011.12.22
申请人 RICOH CO LTD 发明人 WATANABE YASUHIRO;MACHIDA OSAMU;SHIMOFUKU HIKARI;KUSHIDA SHUGAKU;TAKEUCHI JUN;TASHIRO RYO
分类号 H01L41/22;B41J2/045;B41J2/055;H01L41/09;H01L41/18;H01L41/187;H01L41/39 主分类号 H01L41/22
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