| 摘要 |
PURPOSE: A cleaning apparatus of a gas supply unit and a cleaning method thereof are provided to reduce cleaning time by automating a cleaning process of the gas supply unit. CONSTITUTION: A first cleaner (200) is installed in front of a case (102). The first cleaner includes a brush (210) which rotates to remove foreign materials attached to a gas spray unit. The first cleaner is connected to an absorption line (290) to absorb the foreign materials separated by the brush. A second cleaner (300) is installed behind the first cleaner. The second cleaner removes the foreign materials which remain in the gas spray unit.
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