| 摘要 |
PURPOSE: An absolute dislocation measurement device is provided to improve accuracy of measuring a position without forming a target measurement pattern precisely. CONSTITUTION: An absolute dislocation measurement device comprises a target pattern(121), a signal sensing unit(122), and a control unit. The target patterns are formed on one surface of a target object to a moving direction. Valid units(E1-E14) generating set signals and invalid units(N1-N13) generating no set signals are alternately arranged at a first space(I1). The signal sensing unit includes a plurality of sensors(S1-S20) for sensing the set signals. The sensors are arranged on a moving route in a row at a second space(I2) narrower than the first space. The control unit controls the valid units to generate the set signals and determines a current location of the target object according to output signals of the sensors. |
