发明名称 METHOD OF DETERMINING CRACKING OF PLATE-LIKE WORK
摘要 PROBLEM TO BE SOLVED: To determine whether a plate-like work cracks in grinding, and the plate and cause thereof.SOLUTION: A peeling tape 5 is stuck on a protective tape T stuck on a plate-like work W having been ground, the protective tape T is peeled off the plate-like work W together with the peeling tape 5, and it is determined whether the plate-like work W has a crack 31 from a rugged shape of a corresponding trace 30 transferred to a pressure-sensitive adhesive T2 of the protective tape T.
申请公布号 JP2013131537(A) 申请公布日期 2013.07.04
申请号 JP20110278343 申请日期 2011.12.20
申请人 DISCO ABRASIVE SYST LTD 发明人 TSUJIMOTO HIDEKI;RYUU ROISEN
分类号 H01L21/683;H01L21/304 主分类号 H01L21/683
代理机构 代理人
主权项
地址
您可能感兴趣的专利