| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor module which is capable of equally applying pre-pressure to a sensor element, a force detection device and a robot.SOLUTION: A sensor module 10 comprises a sensor element 42 including a piezoelectric substance, a first member 12 accommodating the sensor element 42, a second member 34 which is joined to the first member 12 and seals the first member 12, a first plate 70 and a second plate 80 supporting the first member 12 and the second member 34 between them, and a fastening part 86 which fixes the first member 12 between the first plate 70 and the second plate 80 while pressurizing the first member 12. In the first plate 70, a first pressing part 72 is formed on a surface at a side of the first member 12, which protrudes toward the second member, and the second member 34 is held between the first pressing part 72 and a pressure receiving surface 44 of the sensor element 42. |
