| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer device which supports a substrate with a thin plate to prevent damage to the substrate and suppresses irregularity generated in the substrate, which is caused by friction between the substrate and a support pin supporting the substrate, due to the circular cross section of the support pin.SOLUTION: The substrate transfer device comprises: a base part 10 where a substrate 100 is placed; a support part 20 which penetrates the base part 10 and supports the substrate 100; and a drive part 30 which moves the support part 20 in the vertical direction. The substrate transfer device can suppress irregularity in the substrate 100 because a thin plate 53 of the support part 20 supports the substrate 100. |
