发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To ensure a region for wiring in a semiconductor device having a structure in which the wiring is performed between a plurality of through electrodes.SOLUTION: In a semiconductor device in which a plurality of core chips (memory cell arrays) are stacked, the core chips and interface chips are electrically connected by a plurality of through electrodes 110. Signal lines 150 and power-supply lines 154 are provided between the through electrodes 110. A pad PP of a power-supply through electrode 110P is connected to the adjacent power-supply line 154 in a wiring layer. The width of the pad PP in the extending direction of the power-supply lines 154 is larger than the width in the direction crossing to the extending direction.
申请公布号 JP2013131738(A) 申请公布日期 2013.07.04
申请号 JP20120253815 申请日期 2012.11.20
申请人 ELPIDA MEMORY INC 发明人 WADA SHOJI
分类号 H01L23/522;H01L21/3205;H01L21/768;H01L21/8242;H01L23/12;H01L25/065;H01L25/07;H01L25/18;H01L27/10;H01L27/108 主分类号 H01L23/522
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