摘要 |
PROBLEM TO BE SOLVED: To provide a graphite film with little scattering of flatness, thickness and thermal diffusivity, in high productivity.SOLUTION: When the graphite film is produced by heat-treating a raw material film in a heating furnace provided with a heater, the area of the raw material film is 200 cmor above, and the raw material film is heat-treated in a state held in a first container, and further the first container is held in a second container. It is preferable to flow an inert gas in the second container. Also it is preferable to pile up alternately one or more polymer films and heat-resistant films, in producing the graphite film. |