发明名称 |
METHOD AND DEVICE FOR PRODUCING ORGANIC EL ELEMENT |
摘要 |
<p>A method and a device for producing an organic EL element are provided that make it possible to deposit vaporized material from a vapor deposition source in a desired pattern on a substrate without the need for a conventional band-shaped shadow mask. A shield unit (51) is configured to be switchable between: a shield position for shielding a substrate (81), said position being located between a vapor deposition source (4) and the substrate (81); and a shield release position in which the shield unit is withdrawn from between the vapor deposition source (4) and the substrate (81) so that the substrate (81) is no longer shielded. The shielding unit (51) is switched between the shield position and the shield release position while rotating together with a roller (3).</p> |
申请公布号 |
WO2013099578(A1) |
申请公布日期 |
2013.07.04 |
申请号 |
WO2012JP81975 |
申请日期 |
2012.12.10 |
申请人 |
NITTO DENKO CORPORATION |
发明人 |
KAKIUCHI, RYOHEI;YAMAMOTO, SATORU;HIDA, KANAKO |
分类号 |
H05B33/10;C23C14/24;H01L51/50 |
主分类号 |
H05B33/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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