发明名称
摘要 <p>A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 mum/cm2, wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.</p>
申请公布号 JP5226695(B2) 申请公布日期 2013.07.03
申请号 JP20090544222 申请日期 2007.12.21
申请人 发明人
分类号 H01L21/304;B24B1/00;B24B7/04;B24B37/10 主分类号 H01L21/304
代理机构 代理人
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