发明名称 APPARATUS OF BONDING SEMICONDUCTOR CHIP
摘要 PURPOSE: An apparatus for bonding a semiconductor chip is provided to improve productivity by simplifying a multi stack package process. CONSTITUTION: A transfer rail transfers a substrate. A loading member (120a,120b) loads the substrate. An unloading member (130a,130b) unloads the substrate. A first wafer supply unit supplies a first wafer including a first semiconductor chip. A bonding unit (150a,150b) attaches the first semiconductor chip to the substrate.
申请公布号 KR20130073337(A) 申请公布日期 2013.07.03
申请号 KR20110141130 申请日期 2011.12.23
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HWANG, YI SUNG;LEE, JUNG CHUL;KIM, JAE HONG;CHUNG, TAE GYEONG
分类号 H01L21/58 主分类号 H01L21/58
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