发明名称 |
APPARATUS OF BONDING SEMICONDUCTOR CHIP |
摘要 |
PURPOSE: An apparatus for bonding a semiconductor chip is provided to improve productivity by simplifying a multi stack package process. CONSTITUTION: A transfer rail transfers a substrate. A loading member (120a,120b) loads the substrate. An unloading member (130a,130b) unloads the substrate. A first wafer supply unit supplies a first wafer including a first semiconductor chip. A bonding unit (150a,150b) attaches the first semiconductor chip to the substrate. |
申请公布号 |
KR20130073337(A) |
申请公布日期 |
2013.07.03 |
申请号 |
KR20110141130 |
申请日期 |
2011.12.23 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
HWANG, YI SUNG;LEE, JUNG CHUL;KIM, JAE HONG;CHUNG, TAE GYEONG |
分类号 |
H01L21/58 |
主分类号 |
H01L21/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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