| 摘要 |
PURPOSE: A high temperature evaporation source with an outer heating container is provided to prevent contamination due to evaporation materials even when the heating container is damaged or cracked. CONSTITUTION: A high temperature evaporation source with an outer heating container (400) comprises an inner heating container (200), an evaporation heater (300), and a support member (100). The inner heating container comprises inner and outer heating vessels. The evaporation heater is placed at the outer side of an evaporation container. The support member comprises a coolant path to prevent the heat emission from the evaporation heater. The upper side of the outer heating vessel is open, the inner heating vessel is inserted into the outer heating vessel. The shape of the inner diameter of the outer heating vessel corresponds to the shape of the outer diameter of the inner heating vessel. |
