| 摘要 |
<p>PURPOSE: An apparatus for transferring a wafer is provided to prevent damage, by aligning wafers easily where are carried out from a cassette magazine. CONSTITUTION: An unloading device (100) carries wafers out from a wafer carrying device. The wafer carrying device is loaded with the wafer. A transfer apparatus (200) transfers the wafer. An alignment device (200) performs sliding operation toward the wafer. The alignment device aligns the wafer.</p> |
