Drift control in a charged particle beam system

摘要

A method and apparatus for reducing drift in a charged particle beam system. The method includes providing a charged particle beam column (400) including a charged particle beam (103), a lens system (106), and a sample chamber (115); disposing a temperature-controlled device (302) between the lens system and the sample chamber to control heat transfer between the lens system and the sample chamber; and controlling the temperature of the temperature-controlled device to reduce or eliminate the thermal drift of the position of a sample within the sample chamber relative to the position of the charged particle beam.