| 摘要 |
PURPOSE: A high temperature evaporation source including a heat radiation assembly is provided to maintain high temperature by using heat radiation members for surrounding an evaporation vessel and an evaporation heater. CONSTITUTION: An evaporation vessel (200) accommodates a deposition material. An evaporation heater (300) is arranged around the evaporation vessel. The evaporation heater heats the evaporation vessel. Heat radiation members surround the outer surface of the evaporation heater. The heat radiation members prevent heat from emitting to the outside. |
