发明名称 |
Position measurement using natural frequency vibration of a pattern |
摘要 |
A detection method for detecting a property of an extended pattern formed by at least one line generally extending in a first direction. The extended pattern is formed on a substrate or on a substrate table and may extend, for example, over a length of at least 50× the width of the line. The extended pattern is focus sensitive. The detection method includes moving the substrate table in a first direction and measuring along that first direction a property of the extended pattern. The property can be a result of a physical property of the extended pattern in a second direction perpendicular to the first direction. In a next step a calibration of the substrate table position can be derived from the measured position of the extended pattern.
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申请公布号 |
US8477289(B2) |
申请公布日期 |
2013.07.02 |
申请号 |
US20090476809 |
申请日期 |
2009.06.02 |
申请人 |
SLOTBOOM DAAN MAURTIS;GEERKE JOHAN HENDRIK;AARTS IGOR MATHEUS PETRONELLA;ASML NETHERLANDS B.V. |
发明人 |
SLOTBOOM DAAN MAURTIS;GEERKE JOHAN HENDRIK;AARTS IGOR MATHEUS PETRONELLA |
分类号 |
G03B27/32;G01B11/14 |
主分类号 |
G03B27/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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